O-Ring

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VALQUA No.
VPHS4640
Product name
FLUORITZ-HS
Shape
O-RING (High performance elastomer)
O-RING (High performance elastomer)
Features1
Versatile
Features2
Non-oriented sealing
Inventory status
Manufacturable product

Standard size
・JIS B 2401
・AS 568
Type
Squeeze

Application classification
Common use
Pressure classification
Vacuum
Standard material

none

Non-standard quality of material (adaptable material)

Non-standard materials are subject to the material selection criteria

Sealing direction
Flat surface Cylinder Cylindrical piston Cylindrical rod
○ ○ △ △
Size
All

■ Product content and main applications

Product content
A dark brown product exclusively made for the thermal diffusion process in semiconductor manufacturing equipment in which FLUORITZ-HS, a perfluoroelastomer material, is molded into a ring shape with an O-shaped cross section. It has the best heat-resisting property in the FLUORITZ series and also has excellent radical resistance, purity and low distortion characteristics.
Main applications
The product is used in the areas where a heat-resisting property is required within the thermal diffusion device of semiconductor manufacturing equipment.

■ Service temperature range

Rubber material Service temperature range
FLUORITZ-HS 0℃ ～ 300℃
Click here for the list of rubber materials

Service temperature is subject to the material selection criteria

■ Operating pressure, pressure direction and pressure types

Pressure Pressure (with back-up ring) Pressure direction
- - Bi-directional
-

Pressure types
shock, surge, pulse, vacuum		 They can be all accommodated

■ Motions and strokes applied

For fixing ○
Reciprocating △
Rotating △
Helical △
Opening and shutting ○
Sliding △
Oscillating △
Stroking
Based on the operating conditions

■ Fluid, speed and PV value

Liquid ○
Gas ○
Fine particle ×
General dust ×
Oil film ×
Speed
Based on the operating conditions
PV Value
Based on the operating conditions

Subject to the material selection criteria

■ Lubrication, mountability, sliding resistance, compression resistance, eccentricity/inclination, conformance

Lubrication
-
Mountability
Excellent
Sliding resistance
and compression resistance
Average
Eccentricity/inclination
and conformance
Average


■ Cross-section dimensions and design precautions

・Cross-section dimensions

Φ1.0 or more


・Design precautions

■ Case examples of defects and countermeasures

■ FAQ

‣FAQ about high performance elastomer is here
 ‣FAQ about the elastomer is here

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