O-Ring

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VALQUA No.
SA4640
Product name
SPOQ ARMOR
Shape
O-RING (High performance elastomer)
O-RING (High performance elastomer)
Features1
Versatile
Features2
Non-oriented sealing
Inventory status
Manufacturable product

Standard size
JIS B 2401
AS 568
Type
Squeeze

Application classification
Common use
Pressure classification
Vacuum
Standard material

none

Non-standard quality of material (adaptable material)

Non-standard materials are subject to the material selection criteria

Sealing direction
Flat surface Cylinder Cylindrical piston Cylindrical rod
× ×
Size
All

■ Product content and main applications

Product content
A white product in which SPOQ ARMOR is molded into a ring shape with an O-shaped cross section.
Main applications
It has excellent non-adhesive characteristics and plasma resistance against quartz and metals, and it is used inside the dry-etching/ashing system or CDV equipment of semiconductor and LCD equipment.

■ Service temperature range

Rubber material Service temperature range
SPOQ ARMOR -5℃ ~ 200℃

Service temperature is subject to the material selection criteria

■ Operating pressure, pressure direction and pressure types

Pressure Pressure (with back-up ring) Pressure direction
- - Bi-directional
-

Pressure types
shock, surge, pulse, vacuum
They can be all accommodated

■ Motions and strokes applied

For fixing
Reciprocating ×
Rotating ×
Helical ×
Opening and shutting
Sliding ×
Oscillating ×
Stroking
Based on the operating conditions

■ Fluid, speed and PV value

Liquid
Gas
Fine particle ×
General dust ×
Oil film ×
Speed
Based on the operating conditions
PV Value
Based on the operating conditions

Subject to the material selection criteria

Lubrication, mountability, sliding resistance, compression resistance, eccentricity/inclination, conformance

Lubrication
-
Mountability
Excellent
Sliding resistance
and compression resistance
Average
Eccentricity/inclination
and conformance
Average


■ Cross-section dimensions and design precautions

・Cross-section dimensions

Φ1.0 or more


・Design precautions

■ Case examples of defects and countermeasures

■ FAQ


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