Other Seal

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VALQUA No.
FB4060
Product name
FLID Bonded Seal
Shape
Bonded Seal
Bonded Seal
Features1
Seal for door opening/closing
Features2
Stable mountability
Features3
Does not drop out or become distorted
Inventory status
Products that are made based on the orders received

Standard size
　
Type
Squeeze

Application classification
For door opening/closing
Pressure classification
Vacuum
Standard material

none

Non-standard quality of material (adaptable material)

Non-standard materials are subject to the material selection criteria.

Sealing direction
Flat surface Cylinder Cylindrical piston Cylindrical rod
○ × × ×
Size
Based on the operating conditions

■ Product content and main applications

Product content
A gate seal plate that is baked and integrally molded with transfer gate metal
Main applications
It is used to provide a solution to such problems as torsion, breakage, dusting and dropout of O-ring seal materials that may occur in transfer gate seal mechanisms using O-rings for semiconductor equipment. Exclusively used for under an inert gas environment such as a load-lock chamber

■ Service temperature range

Rubber material Service temperature range
FLID -5℃ ～ 200℃
Click here for the list of rubber materials

Service temperature is subject to the material selection criteria

■ Operating pressure, pressure direction and pressure types

Pressure Pressure (with back-up ring) Pressure direction
- - Bi-directional
-

Pressure types
shock, surge, pulse, vacuum		 Vacuum

■ Motions and strokes applied

For fixing ×
Reciprocating ×
Rotating ×
Helical ×
Opening and shutting ○
Sliding ×
Oscillating ×
Stroking
Based on the operating conditions

■ Fluid, speed and PV value

Liquid ○
Gas ○
Fine particle ×
General dust ×
Oil film ×
Speed
Based on the operating conditions
PV Value
Based on the operating conditions

■ Lubrication, mountability, sliding resistance, compression resistance, eccentricity/inclination, conformance

Lubrication
Not needed
Mountability
Excellent
Sliding resistance
and compression resistance
High
Eccentricity/inclination
and conformance
Low to mid level


■ Cross-section dimensions and design precautions

・Cross-section dimensions


Based on the operating conditions

・Design precautions

Need a set value for the gap dimension with the mating surface under compressive force and when tightened

■ Case examples of defects and countermeasures

■ FAQ

‣FAQ about high performance elastomer is here
 ‣FAQ about the elastomer is here

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